1Emergency Back-Up
2By-Pass Module
33 Way Auto-Valve

1Touch Screen : Push P.M Mode
2N2 Purge : 10min Over
(Eliminate remalining Toxic gases)
3Close the Manual Valve
4Unlock the Clamp
5Take Out the Main Module
66Replace with a prepared
(Include adsorbent in the Main Module)
7Prevent Powder and Corrosion
All Safety Devices must be met to operate.
There are safety devices to prevent Gas Leakage, Fire and Explosion.
| Process | Gas |
|---|---|
| IMP | PH3,ASH3,BF3 |
| Diffusion | HF,Cl2,NH3..(Acid, Alkali) |




| Content | Description |
|---|---|
| Model | TCKOA-S2 |
| Treatment type | Adsorbent |
| Application | IMP, Chemical (Acid, Alkali) |
| Capacity | ~200LPM (Customize) |
| Operation type | Automatic (PLC base TOUCH screen) |
| Dimension (W×D×H, mm) | Scrubber 800×800×1,610 |
| Weight (kg) | 600 kg |
| Power | 1-Phase, 208Vac., 50/60Hz Max. consumption Power / 800 |

| Content | Description | ||
|---|---|---|---|
| Specification | Connection | ||
| Inlet | 2~4 Port | NW50 KF | |
| N2 | 5~10 LPM (4~5kg/cm2) | 3/8", Swagelok | |
| Exhaust | Capacity | -40 ~ -80mmH2O | NW 100 MF Flange |
| Capacity | -40 ~ -80mmH2O | NW 100 MF Flange | |