History

  • 2006

    Establishment of Korean Company & Plasma Lab.

  • 2009

    Establishment of Chinese Company

  • 2013

    Microwave Plasma Installed Samsung (Korea, China) SK Hynix (Korea, China)

  • 2014

    Plasma Scrubber Installed SMIC Beijing

  • 2015

    Plasma Scrubber Installed SMIC B1,B2 Fab.
    Thermal Scrubber Installed Large Scale(LCD)

  • 2016

    Plasma Scrubber Installed SMIC Shanghai Large Scale (LCD)

  • 2017

    Plasma Scrubber Installed HLMC, Silan, Nexchip, Hautian De-NOx System Installed SMIC B1

  • 2018

    Venture Capital Fund Investment & Localization (China)

  • 2019

TRIPLE CORES CO., LTD is a company specializing in atmospheric environment processing and retaining high technology (scrubber) to fully treat waste gases emitted from all processes of Semiconductors, LCD, LED and Solar industry since its establishment in Korea and China in 2006.

Based on Hi-tech materials, various processing technologies and years of accumulated Plasma technology including Microwave Plasma and DC Arc Plasma, TRIPLE CORES is developing safe and convenient products and supplying them to many customers in Semiconductor industry such as SMIC, Samsung and SK Hynix which are world's major Semiconductor manufacturers.

Recently, TRIPLCE CORES has satisfied the need of customers by developing innovative compact NOx, VOC treatment equipment and high-efficiency waste gas treatment equipment. We strive to conduct creative and constant research and development that value the "Clean Future Industry Environment" and improve the quality of public life, and share our dreams with "Made in China 2025 Project."

Business

Plasma Technology

- High Performance
- Energy Saving
- Powerful Thermal Energy & Radical Reaction
- Safe and Efficient Auto Operation
- Application : Semiconductor. , LCD, LED, Solar

Subfab Equipment

- Powder Trap
- Thermoelectric Application
- Corrosion Protection
- Central Monitoring System

Catalyst & Absorption Technology

- Remove Harmful Gas
- Reduced Energy & Utility Usage
- Easy Maintenance
- Application : VOCs, NOx, Toxic, Etc.

Thermal Plasma POU Scrubber

Thermal Plasma POU Scrubber

Plasma Scrubber
- Thermal Plasma Technology System
- Temp. 2,000 ℃ Over : High Performance
- Automatic Safety & Energy Saving Mode
- Semi, LCD, LED, Solar : Optimize all processes
- Corrosion and Powder Management Technology

ProcessGas
CVDSiH4, NF3, WF6, B2H6, TEOS, TDMAT, N2O, C3H6, Etc.
DiffusionSiH4, TEOS, DCS, NH3, ClF3, B2H6, Etc.
EtchCF4, SF6, BCl3, Cl2, HBr, Etc.
Solar-cellSiH4, NH3, Etc.

Thermal & Dry POU Scrubber

Thermal Plasma POU Scrubber

Absorption & Catalyst Scrubber
- Absorption & Catalyst Hybrid Tech.
- Acid, Alkali, NOx Remove All at Once
- Thermal Control Technology
- Zero Ammonia Slip
- High Efficiency & Safety Operation
【Reaction Mechanism】
- 4NO + 4NH3 + O2 → 4N2 + 6H2O
- 4NO + 4NH3 → 5N2 + 6H2O
- 6NO2 + 8NH3 + O2 → 4N2 + 12H2O
- 2NO2 + 4NH3 + O2 → 4N2 + 6H2O
ProcessGas
CVDSiH4, NF3, WF6, B2H6, TEOS, TDMAT, N2O, C3H6, Etc.
DiffusionSiH4, TEOS, DCS, NH3, ClF3, B2H6, Etc.
EtchCF4, SF6, BCl3, Cl2, HBr, Etc.
Solar-cellSiH4, NH3, Etc.

location

Korea Main Office

46-8, Giheungdanjiro 141 Beon-gil, Giheung-gu, Yongin-si, Gyeonggi-do, 17086 Korea.

Tel. +82-31-372-4157
Fax. +82-31-285-2152
E-Mail : mklee@triplecores.com

China Main Office

No. 12 Building, 530 Huicheng Road, Nanhui District, Shanghai, China.

Tel. +86-21-6800-9217
Fax. +86-21-6800-9227
E-Mail : sales@triplecores.com

Singapore Agent

http://www.ellipsiz.com/

4

Working Hours

10

Completed Projects

201

No. of Clients

2

Team Member