HOME Products DC Arc Plasma Wet Scrubber

DC Arc Plasma Wet Scrubber

DC Arc Plasma Wet Scrubber

Home Products DC Arc Plasma Wet Scrubber

Product Overview

View Product Video

  • 1Plasma Generation & Reaction Module

    • Generate DC Arc Plasma with N2
    • Decompose waste gas by pyroltsis process
    • Spray water to avoid recombination of the waste gas
    • Ceramic tube for high resistance to corrosion

  • 2Quenching Section

    • Rapid cooling to avoid NOx
    • Spray water to remove by-product such as powder and water soluble gas
    • Teflon coated for high resistance to corrosion

  • 3Reservoir

    • Store the waste water with high capacity

  • 4Wet Jacket

    • Water spray with packing materials to remove by-product such as powder and water soluble gas

  • Option : Electric chiller

    • Dust removal Good
    • Remarkably improved Moisture removal effect
    • High HF removal rate
    • Improved the Hardware stability and safety

Advantage

  • 1Thermal Plasma Technology System

  • 2Automatic Safety & Energy Saving Mode

  • 3Temp. 2,000℃ Over : High Performance

  • 4Semi, LCD, LED, Solar : Optimize All Processes

  • 5Corrosion and Powder Management Technology

Application

Process Gas
CVD SiH4, NF3, WF6, B2H6, TEOS, TDMAT, N2O, C3H6, Etc.
Diffusion SiH4, TEOS, DCS, NH3, ClF3, B2H6, Etc.
Etch CF4, SF6, BCl3, Cl2, HBr, Etc.
Solar-cell SiH4, NH3,TMA, Etc.

Specification

Content Description
Model A209-H / TCKDW-S6
Treatment type Plasma + Wet
Application Etch, Diffusion, CVD Process
Capacity 600 LPM(Max)
(Including CF4 max capacity 250LPM)
Operation Type Automatic (PLC base TOUCH screen)
Dimension (W×D×H, ㎜) Scrubber 800×800×1,750
Weight (kg) 600 kg
Power 3-Phase, 208Vac., 50/60㎐
Main Circuit Breaker / 100A
Power Consumption / 18 kW
Normal operating(Avg.) / 8 kW (Plasma power)

Utility

Content Description
Specification Connection
Inlet 2~6 Port NW40 KF FLANGE
N2 4~5 kg/cm2 3/8", Swagelok
CDA 4~5 kg/cm2 3/8", Swagelok
PCW 4~5 kg/cm2 3/8", Swagelok or NPT
City Water 1~3 kg/cm2 3/8", Swagelok or NPT
Drain Pumping Drain 3/4” PT Female PVC
Exhaust Gas Exhaust -40 ~ -80mmH2O ISO 100 MF Flange
Thermal Exhaust -40 ~ -80mmH2O ISO 100 MF Flange

Utility

Content Description
Specification Connection
Inlet 2~6 Port NW40 KF FLANGE
N2 4~5 kg/cm2 3/8", Swagelok
CDA 4~5 kg/cm2 3/8", Swagelok
PCW 4~5 kg/cm2 3/8", Swagelok or NPT
City Water 1~3 kg/cm2 1/2", Swagelok or 2Port
Drain Pumping Drain 3/4” PT Female PVC
Exhaust Gas Exhaust -40 ~ -80mmH2O ISO 100 MF Flange
Thermal Exhaust -40 ~ -80mmH2O ISO 100 MF Flange
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