Technology

Heat Wet Scrubber

Product Overview

  • 1Main Chamber

    • • Self Heater Cleaning System
    • • Protect Heater from Toxic Gases
    • • Powder Free
    • • Sufficient for Treatment Time
  • 2Cooling Unit

    • • Dual Cooling System
    • • Prevent Powder and Corrosion
  • 3Wet Tank

    • • Easy Check
    • • Easy PM
    • • Easy to remove Powder
  • 4Wet Tower

    • • Fully cool down gas before Exhaust
    • • High performance Wet Tower

Advantage

  • 1High Efficiency

  • 2Thermal Control Technology

  • 3Safety Operation

  • 4Self Heater Cleaning System

  • 5Easily Maintanance(Tilting Chamber)

  • 6Prevent Powder and Corrosion

Application

Process Gas
CVD/PVD SiH4, NF3, WF6, B2H6, TEOS, TDMAT, N2O, C3H6, Etc.
Diffusion SiH4, TEOS, DCS, NH3, ClF3, B2H6, Etc.

Specification

Content Description
Model TCKTW-S6
Treatment type Heater+ Wet
Application DIFFUSION,CVD,PVD
Capacity 600LPM(Max)
Operation type Automatic (PLC base TOUCH screen)
Dimension (W×D×H, mm) Scrubber 900×1000×1,900
Weight (kg) 600kg
Power 3-Phase, 208Vac., 50/60Hz
Max Current / 75A
Max. consumption Power / 13kW

Utility

Content Description
Specification Connection
Inlet 2~6 Port NW40 KF FLANGE
CDA 30~200 LPM (4~5kg/cm2) 3/8", Swagelok
PCW 5~10 LPM (3~5 kg/cm2) 3/8", Swagelok
N2 20~100 LPM (4~5 kg/cm2) 3/8", Swagelok
Drain Pumping Drain 3/4" PT PVC
Exhaust Gas Exhaust -40 ~ -80mmH2O NW 100 MF Flange
Thermal Exhaust -40 ~ -80mmH2O NW 100 MF Flange
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