Technology

Plasma Wet Scrubber

Product Overview

  • 1Plasma Generation & Reaction Module

    • • Generate DC thermal palsma with N2
    • • Decompose waste gas by pyroltsis process
    • • Spray water to avoid recombination of the waste gas
    • • Ceramic tube for high resistance to corrosion
  • 2Quenching Section

    • • Rapid cooling to avoid NOx
    • • Spray water to remove by-product such as powder and water soluble gas
    • • Teflon coated for high resistance to corrosion
  • 3Reservoir

    • • Store the waste water with high capacity
  • 4Wet Jacket

    • • Water spray with packing materials to remove by-product such as powder and water soluble gas
  • Option : Electric chiller

    • • Dust removal Good
    • • Remarkably improved Moisture removal effect
    • • High HF removal rate
    • • Improved the Hardware stability and safety

Advantage

  • 1Thermal Plasma Technology System

  • 2Automatic Safety & Energy Saving Mode

  • 3Temp. 2,000℃ Over : High Performance

  • 4Semi, LCD, LED, Solar : Optimize All Processes

  • 5Corrosion and Powder Management Technology

Application

Process Gas
CVD SiH4, NF3, WF6, B2H6, TEOS, TDMAT, N2O, C3H6, Etc.
Diffusion SiH4, TEOS, DCS, NH3, ClF3, B2H6, Etc.
Etch CF4, SF6, BCl3, Cl2, HBr, Etc.
Solar-cell SiH4, NH3,TMA, Etc.

Specification

Content Description
Model A209-H, A209, A209WH
Treatment type Plasma + Wet
Application CVD Diffusion Etch
Capacity 600LPM(Max)
Operation type Automatic (PLC base TOUCH screen)
Dimension (W×D×H, mm) Scrubber 900×900×1,850
Weight (kg) 550 kg
Power 3-Phase, 208Vac., 50/60Hz
Main Circuit Breaker / 100 A
Max. Power Consumption / 18 kW

Utility

Content Description
Specification Connection
Inlet 2~6 Port NW40 KF FLANGE
N2 20~150 LPM (4~5kg/㎠) 1/2", Swagelok
CDA 30~200 LPM (4~5kg/㎠) 1/2", Swagelok
PCW 20~50 LPM (4~5 kg/㎠) 3/4", Swagelok
City Water 5~10 LPM (3~5 kg/㎠) 3/4", Swagelok
Drain Pumping Drain 3/4" PT Female PVC
Exhaust Gas Exhaust -40 ~ -80mmH2O ISO 100 FLANGE
Thermal Exhaust -40 ~ -80mmH2O ISO 100 FLANGE
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